Electro-optic sampling probe and a method for adjusting the same
US6445198B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 3, 2000 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Apr 3, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electro-optic sampling probe includes an electro-optic element which is to be positioned to contact wiring on an IC wafer surface which is a measurement target and whose optical characteristics are changed depending on an electric field applied via the wiring and an electro-optic sampling optical system module having a polarized beam splitter, a wave plate, and a photo diode. The module separates light, which is transmitted through the electro-optic element and is reflected by a surface of the electro-optic element from laser light emitted from the outside and converts the separated light into an electric signal, and includes an optical axis adjuster attached to a detachable portion of an optical fiber that emits the laser light for adjusting the optical axis of the laser light and a light receiving surface adjuster attached to the detachable portion of the photo diode for adjusting the position of a light receiving surface of the photo diode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.