Complexes having tris(pyrazolyl)methanate ligands
US6452017B1 · kind B1 · utility
267Cited by
3References
26Claims
0Family size
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Key dates
| Filing date | Jul 14, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Jul 14, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02197
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods of forming a film on a substrate using chemical vapor deposition techniques and pyrazolyl complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.