Planar motor with linear coil arrays
US6452292B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 26, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Jun 26, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A planar electric motor comprising a magnet array having a plurality of magnets with magnetic fields of alternating polarity and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array. The coil array includes a first linear coil array having a plurality of polygonal shaped coils extending longitudinally in a first direction, and a second linear coil array having a plurality of oval shaped coils extending longitudinally in a second direction generally orthogonal to said first direction. The motor is for use in moving a stage within an exposure apparatus having an optical system for imaging a pattern formed in a reticle onto an article supported by the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.