Michael Binnard
87Patents
14h-index
50Co-inventors
87Inventor score
Filing activity: Nov 16, 1998 → Aug 23, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6445093B1 | Planar motor with linear coil arrays | Electricity | 125 | Expired |
| US6452292B1 | Planar motor with linear coil arrays | Emerging Cross-Sectional Technologies | 100 | Expired |
| US7372538B2 | Apparatus and method for maintaining immerison fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | Physics | 87 | Expired |
| US6788385B2 | Stage device, exposure apparatus and method | Physics | 69 | Expired |
| US6208045A | Electric motors and positioning devices having moving magnet arrays and six degrees of freedom | Emerging Cross-Sectional Technologies | 67 | Expired |
| US7545479B2 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | Physics | 59 | Active |
| US7327435B2 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | Physics | 59 | Expired |
| US6650079B2 | System and method to control planar motors | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6678038B2 | Apparatus and methods for detecting tool-induced shift in microlithography apparatus | Physics | 30 | Expired |
| US6750625B2 | Wafer stage with magnetic bearings | Electricity | 18 | Expired |
| US6590639B1 | Active vibration isolation system having pressure control | Physics | 18 | Expired |
| US6686991B1 | Wafer stage assembly, servo control system, and method for operating the same | Physics | 17 | Expired |
| US6523695B1 | Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems | Physics | 14 | Expired |
| US6504162B1 | Stage device, control system, and method for stabilizing wafer stage and wafer table | Physics | 14 | Expired |
| US6927505B2 | Following stage planar motor | Electricity | 13 | Expired |
| US8705170B2 | High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations | Physics | 12 | Active |
| US7368838B2 | High efficiency voice coil motor | Electricity | 11 | Expired |
| US6758313B2 | Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems | Physics | 11 | Expired |
| US7417714B2 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Physics | 7 | Active |
| US6844694B2 | Stage assembly and exposure apparatus including the same | Physics | 7 | Expired |
| US6551045B2 | Wafer stage chamber | Electricity | 6 | Expired |
| US6987559B2 | Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same | Physics | 6 | Expired |
| US8488100B2 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | Physics | 6 | Active |
| US6956308B2 | Dual flow circulation system for a mover | Electricity | 6 | Expired |
| US6639654B2 | Wafer stage carrier and removal assembly | Emerging Cross-Sectional Technologies | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.