Rotating compensator ellipsometer system with spatial filter
US6456376B1 · kind B1 · utility
22Cited by
21References
37Claims
0Family size
Assignee
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Key dates
| Filing date | May 24, 2001 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | May 24, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2866
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.