Compensation component and process for producing the compensation component

US6465869B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Dirk Ahlers · Hersbruck, DE
• Frank Pfirsch · Birkenfeld, DE

Key dates

• Filing date: May 30, 2001
• Grant date: Oct 15, 2002
• Expiry date: May 30, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D62/405

Abstract

A compensation component includes a drift path formed of p-conducting and n-conducting layers which are led around or along a trench. A process for producing the compensation component is also provided.