Abatement of fluorine gas from effluent
US6468490B1 · kind B1 · utility
42Cited by
42References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Jul 11, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/8662
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An effluent abatement system 200 that may be used to abate F2 gas content of effluent exhausted from a process chamber 35, such as effluent from a CVD chamber cleaning process includes a catalytic reactor 250 to reduce the content of F2 in the effluent 100. The system may further include a prescrubber 230 to add reactive gases to the effluent 100 and/or to treat the effluent 100 prior to treatment in the catalytic reactor 250. Alternatively reactive gases can be added to the effluent 100 by a gas source 220.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.