Mehran Moalem
9Patents
6h-index
16Co-inventors
60Inventor score
Filing activity: Jul 27, 1995 → Jun 3, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6367412B1 | Porous ceramic liner for a plasma source | Emerging Cross-Sectional Technologies | 82 | Expired |
| US6468490B1 | Abatement of fluorine gas from effluent | Performing Operations; Transporting | 42 | Expired |
| US5861346A | Process for forming silicon carbide films and microcomponents | Emerging Cross-Sectional Technologies | 19 | Expired |
| US8747762B2 | Methods and apparatus for treating exhaust gas in a processing system | Emerging Cross-Sectional Technologies | 16 | Active |
| US9597634B2 | Methods and apparatus for treating exhaust gas in a processing system | Emerging Cross-Sectional Technologies | 9 | Active |
| US9387428B2 | Systems and methods for treating flammable effluent gases from manufacturing processes | Performing Operations; Transporting | 7 | Active |
| US11110392B2 | Apparatus for treating exhaust gas in a processing system | Emerging Cross-Sectional Technologies | 0 | Active |
| US10722840B2 | Methods for treating exhaust gas in a processing system | Emerging Cross-Sectional Technologies | 0 | Active |
| US9080576B2 | Method and apparatus for controlling a processing system | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.