Method and apparatus for determining measurement frequency based on hardware age and usage
US6469518B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Jan 7, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing line includes a processing tool, a measurement tool, and an automatic process controller. The processing tool is adapted to process articles. The measurement tool is adapted to measure a characteristic of selected articles at a measurement frequency. The automatic process controller is adapted to change the measurement frequency based on a usage characteristic of the processing tool. A method for monitoring a processing tool includes processing a plurality of articles in the processing tool; measuring a characteristic of selected articles at a measurement frequency; and changing the measurement frequency based on a usage characteristic of the processing tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.