Interlocking chemical mechanical polishing system
US6475332B1 · kind B1 · utility
35Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2000 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Oct 18, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B47/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An interlocking polishing belt apparatus is disclosed. The interlocking polishing belt apparatus includes an interlocking belt, which includes a plurality of studs each having an upper stud end and a lower stud end. In addition, the interlocking polishing belt apparatus includes a polishing belt that is in contact with the interlocking belt. The polishing belt has a plurality of polishing belt stud holes, each configured to interlock with an upper stud end.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.