Pellicle and method for manufacture thereof
US6475575B1 · kind B1 · utility
12Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 6, 2001 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Aug 6, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2201/04
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
It is characterized by having a pellicle sheet made of a synthetic quartz glass having an OH group concentration of at most 100 ppm and containing substantially no oxygen deficient defect. It is particularly preferred that the OH group concentration is at most 10 ppm, and the internal transmittance is at least 80%/cm at a wavelength of 157 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.