Beam automation in charged-particle-beam systems
US6476398B1 · kind B1 · utility
10Cited by
1References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2000 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Feb 26, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/216
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments in accordance with the invention provide respectively for auto-focus, auto-contrast, and auto-correction of astigmatism in both x and y directions, are independent of focus-induced-image-rotation, sample feature orientation and image deformation, and focus-induced-image magnification change, and are insensitive to various kinds of noise. Poor image contrast is handled by an auto-contrast capability. Embodiments in accordance with the invention can achieve high reliability and repeatability, while providing for faster operation than most prior-art methods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.