Method and apparatus for cooling a silicon on insulator device
US6476483B1 · kind B1 · utility
20Cited by
8References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1999 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Oct 20, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S257/93
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an electronic device with an active region on top of and isolated from an substrate, a first material region is defined on top of and/or adjacent to and electrically isolated from the active region and a second material region is attached to a surface of the first material region to form an interface defining a Peltier cooling junction therebetween. A current source connected in series to the first and the second material regions produces a cooling effect at the Peltier cooling junction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.