Temperature measuring method, temperature control method and processing apparatus
US6479801B1 · kind B1 · utility
45Cited by
4References
7Claims
0Family size
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Key dates
| Filing date | Oct 19, 2000 |
| Grant date | Nov 12, 2002 |
| Priority date | — |
| Expiry date | Oct 19, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A temperature measuring method measures the temperature of an object of measurement placed in a multiple reflection environment by using a radiation thermometer that uses an effective emissivity &egr;eff for measurement. The effective emissivity &egr;eff is calculated by using an expression:&egr;eff=(1−&agr;)·&egr;+&agr;·&egr;/{1−F·r·(1−&egr;)}F: View factor &egr;: Emissivity of the objectr: Reflectivity of a reflecting plate included in the radiation thermometer&agr;: Weighting factor for compensating effects of multiple reflection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.