Takashi Shigeoka
16Patents
7h-index
33Co-inventors
62Inventor score
Filing activity: Mar 16, 2000 → Mar 15, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6479801B1 | Temperature measuring method, temperature control method and processing apparatus | Physics | 45 | Expired |
| US6437290B1 | Heat treatment apparatus having a thin light-transmitting window | Chemistry; Metallurgy | 25 | Expired |
| US7717061B2 | Gas switching mechanism for plasma processing apparatus | Emerging Cross-Sectional Technologies | 18 | Active |
| US6876816B2 | Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment | Electricity | 14 | Expired |
| US6891131B2 | Thermal processing system | Electricity | 11 | Expired |
| US6488407B1 | Radiation temperature measuring method and radiation temperature measuring system | Physics | 9 | Expired |
| US6641302B2 | Thermal process apparatus for a semiconductor substrate | Physics | 8 | Expired |
| US8907318B2 | Resistance change memory | Electricity | 6 | Active |
| US6467952B2 | Virtual blackbody radiation system and radiation temperature measuring system | Physics | 6 | Expired |
| US6825615B2 | Lamp having a high-reflectance film for improving directivity of light and heat treatment apparatus having such a lamp | Electricity | 5 | Expired |
| US8759806B2 | Semiconductor memory device | Electricity | 4 | Active |
| US8576606B2 | Nonvolatile semiconductor memory device | Emerging Cross-Sectional Technologies | 3 | Active |
| US6860634B2 | Temperature measuring method, heat treating device and method, computer program, and radiation thermometer | Physics | 2 | Expired |
| US8075698B2 | Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing | Electricity | 0 | Active |
| US6534749B2 | Thermal process apparatus for measuring accurate temperature by a radiation thermometer | Mechanical Engineering; Lighting; Heating | 0 | Expired |
| US10896891B2 | Semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.