Ultra-broadband UV microscope imaging system with wide range zoom capability
US6483638B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2000 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | May 15, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7065
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.