Sample heating holder, method of observing a sample and charged particle beam apparatus
US6495838B1 · kind B1 · utility
32Cited by
7References
12Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 16, 1999 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Jul 16, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2001
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
High resolution observation of a sample at a high temperature above 1000° C. is accomplished by suppressing sample drift by heating over a short time and with small electric current. A heater envelope made of a ceramic having a carbon coating on the surface is attached around a heater surrounding the sample. The heater envelope is rotatable around pivot screws, and has an outer frame portion of a holder individually having slots capable of letting an FIB enter so that the sample mounting on the holder, as it is, may be milled with the FIB.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.