Crash prevention in positioning apparatus for use in lithographic projection apparatus
US6498350B2 · kind B2 · utility
12Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2000 |
| Grant date | Dec 24, 2002 |
| Priority date | — |
| Expiry date | Jun 26, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.