Inspection stage including a plurality of Z shafts, and inspection apparatus
US6501289B1 · kind B1 · utility
89Cited by
9References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 9, 2000 |
| Grant date | Dec 31, 2002 |
| Priority date | — |
| Expiry date | Mar 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection stage has the following a chuck top on which an object to be examined is mounted, a Z base for which the chuck top is provided and which is vertically movable, an X stage which supports the Z base to be vertically movable and which is movable in an X direction, and a Y stage which supports the X stage to be movable in the X direction and which is movable in a Y direction. The Z base is held and supported by three Z shaft lift mechanisms and is vertically movable. The inspection stage is applicable to an inspection stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.