Antireflective composition
US6503689B2 · kind B2 · utility
42Cited by
5References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2001 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Sep 19, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/254
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed are new antireflective compositions including cross-linked polymeric particles including one or more chromophores. Also disclosed are methods of forming relief images using these antireflective compositions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.