Radial flow turbomolecular vacuum pump
US6508631B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1999 |
| Grant date | Jan 21, 2003 |
| Priority date | — |
| Expiry date | Nov 18, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/042
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A radial flow turbomolecular vacuum pump includes a gas inlet, a gas outlet, a rotor, and a stator. The rotor includes a first rotor surface that is positioned in a substantially radial direction. A plurality of blades extends from the first rotor surface in a substantially axial direction. The stator includes a first stator surface that is positioned proximate to the first rotor surface in the substantially radial direction. A first and second plurality of vanes extend from the first stator surface and generally forms an annulus therebetween for receiving the first plurality of blades. A drive shaft is coupled to the rotor and positioned in the substantially axial direction. A motor is coupled to the drive shaft and rotates the rotor relative to the stator. The rotation of the rotor relative to the stator causes gas to be pumped from the gas inlet to the gas outlet in the substantially radial direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.