Electrostatic deflector for electron beam exposure apparatus
US6509568B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 1999 |
| Grant date | Jan 21, 2003 |
| Priority date | — |
| Expiry date | Nov 1, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/151
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam radiation apparatus having an electrostatic deflector capable of deflecting the electron beam with high accuracy and with a reduced displacement of the deflection position, is disclosed. The electrostatic deflector comprises a cylindrical holding member made of an insulating material and a plurality of electrodes separately fixed from each other inside of the holding member with at least a part of the surface thereof covered with a metal film. The holding member has a plurality of wedge-shaped fixing holes corresponding to the portions of the electrodes where they are fixed, respectively, the holes having a larger diameter on the outer peripheral surface than on the inner peripheral surface of the holding member. The electrodes are fixed on the holding member in such a manner that a molten joining metal is injected in the fixing holes with the electrodes arranged on the holding member and the joining metal is hardened in close contact with the metal film of the electrodes. The electrodes fixed on the holding member are so shaped that the inner wall of the holding member is invisible from the cylinder axis of the holding member. The electrodes have a metal thin film…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.