Tomohiko Abe
35Patents
14h-index
55Co-inventors
84Inventor score
Filing activity: Sep 19, 1979 → Oct 27, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5841145A | Method of and system for exposing pattern on object by charged particle beam | Electricity | 43 | Expired |
| US4469619A | Method of manufacturing a green phosphor | Chemistry; Metallurgy | 30 | Expired |
| US5391886A | Charged particle beam exposure system and method of exposing a pattern on an object by such a charged particle beam exposure system | Performing Operations; Transporting | 27 | Expired |
| US5528048A | Charged particle beam exposure system and method | Electricity | 26 | Expired |
| US5614725A | Charged particle beam exposure system and method | Electricity | 23 | Expired |
| US5430304A | Blanking aperture array type charged particle beam exposure | Electricity | 22 | Expired |
| US6646275B2 | Charged particle beam exposure system and method | Electricity | 22 | Expired |
| US6242751A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 20 | Expired |
| US5977548A | Charged particle beam exposure system and method | Electricity | 17 | Expired |
| US5304811A | Lithography system using charged-particle beam and method of using the same | Performing Operations; Transporting | 16 | Expired |
| US6118129A | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Electricity | 16 | Expired |
| US5770862A | Charged particle exposure apparatus, and a charged particle exposure method | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6465796B1 | Charge-particle beam lithography system of blanking aperture array type | Electricity | 16 | Expired |
| US5757015A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 15 | Expired |
| US5359202A | Electron beam exposure apparatus employing blanking aperture array | Electricity | 14 | Expired |
| US5969365A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 13 | Expired |
| US6486479B1 | Charged particle beam exposure system and method | Electricity | 12 | Expired |
| US5719402A | Method of and system for charged particle beam exposure | Electricity | 12 | Expired |
| US5590048A | Block exposure pattern data extracting system and method for charged particle beam exposure | Electricity | 11 | Expired |
| US6055719A | Method for manufacturing an electrostatic deflector | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6268606A | Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up | Electricity | 10 | Expired |
| US5920077A | Charged particle beam exposure system | Electricity | 10 | Expired |
| US5546319A | Method of and system for charged particle beam exposure | Electricity | 9 | Expired |
| US5949078A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 7 | Expired |
| US6509568B1 | Electrostatic deflector for electron beam exposure apparatus | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.