MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery
US6511706B1 · kind B1 · utility
11Cited by
22References
41Claims
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Key dates
| Filing date | Nov 16, 1999 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | Nov 16, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/0464
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A precursor composition useful for liquid delivery MOCVD, including SBT precursors dissolved in a solvent system containing tetrahydrofuran. The associated liquid delivery MOCVD process may be carried out with vaporization of the precursor composition on a porous vaporization element having an average pore diameter in the range of from about 50 to about 200 micrometers, with the resultant precursor vapor being admixed with a carrier gas to achieve high efficiency formation of SBT films.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.