Method of preventing toppling of lower electrode through flush cleaning
US6511891B2 · kind B2 · utility
2Cited by
1References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2001 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | Jul 14, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32134
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming the lower electrode of a capacitor capable of withstanding the flushing force produced by a cleaning agent. A lower electrode having a rectangular profile when viewed from the top is provided. The lower electrode is bounded by a pair of ends and a pair of sides. The ends and the sides are linked together. The ends have a wedge shape. The sides have edges that cave in towards the center, thereby forming a recess region between the sides. A flushing operation is carried out using a cleaning solution. The cleaning solution flows from one end of the electrode to the other end along the sides.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.