SOI device with structure for enhancing carrier recombination and method of fabricating same
US6512244B1 · kind B1 · utility
35Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2001 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | May 7, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6715
Abstract
A semiconductor-on-insulator (SOI) device. The SOI device includes an SOI wafer including an active layer, a substrate and a buried insulation layer disposed therebetween. The active layer includes an abrupt region disposed along a lower portion of the active layer, the abrupt region having the same P or N doping type as a doping type of a body region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.