Patent · US Expired

SOI device with structure for enhancing carrier recombination and method of fabricating same

US6512244B1 · kind B1 · utility

35Cited by
6References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 7, 2001
Grant dateJan 28, 2003
Priority date
Expiry dateMay 7, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6715

Abstract

A semiconductor-on-insulator (SOI) device. The SOI device includes an SOI wafer including an active layer, a substrate and a buried insulation layer disposed therebetween. The active layer includes an abrupt region disposed along a lower portion of the active layer, the abrupt region having the same P or N doping type as a doping type of a body region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.