Probe station thermal chuck with shielding for capacitive current
US6512391B2 · kind B2 · utility
19Cited by
8References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | Jun 24, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N10/17
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.