Cleaning method using an oxidizing agent, chelating agent and fluorine compound
US6514352B2 · kind B2 · utility
17Cited by
11References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 9, 2001 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Oct 9, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The cleaning method described above is characterized by allowing a cleaning agent comprising an oxidizing agent, a chelating agent and fluorine compound to flow on a surface of a material to be treated at a high speed to thereby clean the above surface according to the present invention, deposits adhering firmly to a surface of a material to be treated can readily be removed without damaging the material to be treated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.