Patent · US Expired

Apparatus for growing a single crystalline ingot

US6527859B2 · kind B2 · utility

11Cited by
5References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 3, 2001
Grant dateMar 4, 2003
Priority date
Expiry dateAug 3, 2021

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T117/1072
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A chamber with a quartz crucible established therein for growing a single crystalline ingot with a predetermined diameter D which is to be put in the crucible. The quartz crucible is wrapped in a crucible supporter fixed to a rotational axis, with a heater surrounding the crucible support and a thermos surrounding the heater to prevent heat radiated from the heater from propagating into a wall of the chamber. A thermal shield is included which has a first cylindrical shielding part installed between the ingot and the crucible, a second flange type shielding part connected to an upper part of the first shielding part, and a third shielding part connected to a lower part of the first shielding part and protruding toward the ingot.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.