Low dielectric constant porous materials having improved mechanical strength
US6528153B1 · kind B1 · utility
13Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1999 |
| Grant date | Mar 4, 2003 |
| Priority date | — |
| Expiry date | Sep 30, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249991
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to porous materials, typically xerogels or aerogels, having a low dielectric constant but relatively poor mechanical strength. The present invention relates to polymeric coatings, preferably parylene, coated on inorganic xerogels or aerogels so as to increase the mechanical strength while not substantially degrading the dielectric properties of the resulting coated material. Silica xerogel conformally coated with parylene AF-4 is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.