Jeffrey C. Benzing
23Patents
15h-index
24Co-inventors
81Inventor score
Filing activity: May 17, 1985 → Feb 19, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5238499A | Gas-based substrate protection during processing | Electricity | 367 | Expired |
| US5346578A | Induction plasma source | Electricity | 202 | Expired |
| US5405480A | Induction plasma source | Electricity | 121 | Expired |
| US5230741A | Gas-based backside protection during substrate processing | Emerging Cross-Sectional Technologies | 83 | Expired |
| US4657616A | In-situ CVD chamber cleaner | Emerging Cross-Sectional Technologies | 78 | Expired |
| US5620525A | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate | Electricity | 74 | Expired |
| US5882417A | Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus | Electricity | 66 | Expired |
| US5578532A | Wafer surface protection in a gas deposition process | Electricity | 65 | Expired |
| US6251770A | Dual-damascene dielectric structures and methods for making the same | Electricity | 56 | Expired |
| US5843233A | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Electricity | 44 | Expired |
| US5925411A | Gas-based substrate deposition protection | Electricity | 43 | Expired |
| US5374594A | Gas-based backside protection during substrate processing | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6126382A | Apparatus for aligning substrate to chuck in processing chamber | Emerging Cross-Sectional Technologies | 37 | Expired |
| US5769951A | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Electricity | 36 | Expired |
| US5653813A | Cyclone evaporator | Chemistry; Metallurgy | 21 | Expired |
| US5605599A | Method of generating plasma having high ion density for substrate processing operation | Electricity | 15 | Expired |
| US6528153B1 | Low dielectric constant porous materials having improved mechanical strength | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5901271A | Process of evaporating a liquid in a cyclone evaporator | Chemistry; Metallurgy | 13 | Expired |
| US8192806B1 | Plasma particle extraction process for PECVD | Electricity | 8 | Active |
| US6225744A | Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil | Electricity | 8 | Expired |
| US7060605B2 | Methods for making dual-damascene dielectric structures | Electricity | 3 | Expired |
| US6909190B2 | Dual-damascene dielectric structures | Electricity | 3 | Expired |
| US7501339B2 | Methods for making dual-damascene dielectric structures | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.