Methods and apparatus for positive wafer process status identification during semiconductor wafer processing
US6530734B2 · kind B2 · utility
2Cited by
9References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 8, 2000 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Dec 8, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The processing status of a plurality of semiconductor wafers undergoing processing is positively identified by the use of indicator flags associated with cassettes containing the wafers. The flags are moved between at least two processing state indicating positions during processing of the wafers by a robotic arm that also transfers the wafers between the cassettes and a wafer processing station.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.