Electrostatic trap for particles entrained in an ion beam
US6534775B1 · kind B1 · utility
14Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 1, 2000 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Jan 20, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31705
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system for inhibiting the transport of contaminant particles with an ion beam includes a pair of electrodes that provide opposite electric fields through which the ion beam travels. A particle entrained in the ion beam is charged to a polarity matching the polarity of ion beam when traveling through a first of the electric fields. The downstream electrode provides another electric field for repelling the positively charged particle away from the direction of beam travel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.