Inventor · Belmont, MA, US

Michael Graf

34Patents
10h-index
50Co-inventors
78Inventor score

Filing activity: Mar 27, 1998 → Oct 28, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US6804560B2 Retina implant Electricity 91 Expired
US6101971A Ion implantation control using charge collection, optical emission spectroscopy and mass analysis Electricity 91 Expired
US6298270A Retina implant Human Necessities 49 Expired
US6135128A Method for in-process cleaning of an ion source Electricity 49 Expired
US6847847B2 Retina implant assembly and methods for manufacturing the same Human Necessities 42 Expired
US6347250B1 Optically controllable microelectrode array for stimulating cells within a tissue Human Necessities 27 Expired
US6828572B2 Ion beam incident angle detector for ion implant systems Electricity 16 Expired
US6953942B1 Ion beam utilization during scanned ion implantation Electricity 16 Expired
US6534775B1 Electrostatic trap for particles entrained in an ion beam Electricity 14 Expired
US6476399B1 System and method for removing contaminant particles relative to an ion beam Electricity 12 Expired
US6992310B1 Scanning systems and methods for providing ions from an ion beam to a workpiece Electricity 8 Expired
US6608315B1 Mechanism for prevention of neutron radiation in ion implanter beamline Electricity 7 Expired
US8193513B2 Hybrid ion source/multimode ion source Electricity 6 Active
US7589333B2 Methods for rapidly switching off an ion beam Electricity 5 Active
US8097860B2 Multiple nozzle gas cluster ion beam processing system and method of operating Electricity 5 Active
US7750320B2 System and method for two-dimensional beam scan across a workpiece of an ion implanter Electricity 4 Active
US8089052B2 Ion source with adjustable aperture Electricity 4 Active
US8691700B2 Gas cluster ion beam etch profile control using beam divergence Electricity 4 Active
US8173980B2 Gas cluster ion beam system with cleaning apparatus Electricity 3 Active
US7423277B2 Ion beam monitoring in an ion implanter using an imaging device Electricity 3 Active
US6992308B2 Modulating ion beam current Electricity 3 Expired
US8304033B2 Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles Electricity 2 Active
US7375355B2 Ribbon beam ion implanter cluster tool Electricity 2 Active
US8981322B2 Multiple nozzle gas cluster ion beam system Electricity 2 Active
US9735019B2 Process gas enhancement for beam treatment of a substrate Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.