Sealing techniques suitable for different geometries and constrained spaces
US6536777B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1999 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Mar 31, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S277/913
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a fluid connector for sealing an interface between first and second fluid passages in a plasma processing apparatus. The fluid connector includes a first end member having a first geometry. The first geometry is arranged to substantially seal a first mating region of the first fluid passage. The fluid connector further includes a second end member having a second geometry. The second geometry is arranged to substantially seal a second mating region of the second fluid passage and the second geometry is configured differently than the first geometry. The fluid connector additionally includes an opening that extends through the first end member and the second end member through which a fluid may pass for use by the, semiconductor processing apparatus so as to fluidly couple the first fluid passage to the second fluid passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.