Method of depositing low dielectric constant silicon carbide layers
US6537733B2 · kind B2 · utility
258Cited by
35References
90Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2001 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Apr 22, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/1031
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming a silicon carbide layer for use in integrated circuits is provided. The silicon carbide layer is formed by reacting a gas mixture comprising a silicon source, a carbon source, and a nitrogen source in the presence of an electric field. The as-deposited silicon carbide layer incorporates nitrogen therein from the nitrogen source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.