Patent · US Expired

Packaging substrate comprising staggered vias

US6538307B1 · kind B1 · utility

2Cited by
9References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 31, 2001
Grant dateMar 25, 2003
Priority date
Expiry dateJan 31, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/181
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A packaging substrate is formed with staggered vias interconnecting fan-out circuitry for improved strength and rigidity. Embodiments of the present invention include substrates wherein less than 20% of the vias are aligned.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.