Acoustic mirror and method for producing the acoustic mirror

US6542054B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Robert Aigner · Winter Garden, US
• Stephan Marksteiner · Putzbrunn, DE
• Hans-Jörg Timme · Ottobrunn, DE
• Luder Elbrecht · Hersbruck, DE
• Annette Sanger · Dresden, DE

Key dates

• Filing date: Apr 1, 2002
• Grant date: Apr 1, 2003
• Expiry date: Apr 1, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42
• WIPO field: Basic communication processes
• WIPO sector: Electrical engineering

Abstract

An acoustic mirror is described which is formed of at least one first insulating layer, a first metal layer disposed thereon, a second insulating layer disposed thereon and a second metal layer disposed thereon. An auxiliary layer is produced on the first insulating layer whereby a recess extending as far as the first insulating layer is created therein. The first metal layer is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer disposed outside the recess are no longer present. The second metal layer is also produced in a recess with the aid of chemical/mechanical polishing. More than two insulating layers and two metal layers can be provided. The first metal layer and the second metal layer can be produced in the same recess.