Inventor · Dresden, DE

Annette Sanger

12Patents
3h-index
24Co-inventors
56Inventor score

Filing activity: Dec 11, 2000 → Dec 15, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US9660037B1 Semiconductor wafer and method Electricity 35 Active
US6542054B2 Acoustic mirror and method for producing the acoustic mirror Emerging Cross-Sectional Technologies 21 Expired
US6774005B2 Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide Electricity 3 Expired
US7199414B2 Stress-reduced layer system for use in storage capacitors Electricity 3 Expired
US6987295B2 Trench capacitor and method for fabricating the trench capacitor Electricity 3 Expired
US6916704B2 Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitor Electricity 2 Expired
US6998307B2 Method for fabricating a storage capacitor Electricity 2 Expired
US6686265B2 Method of producing a capacitor electrode with a barrier structure Electricity 2 Expired
US7273790B2 Method for fabricating trench capacitor with insulation collar electrically connected to substrate through buried contact, in particular, for a semiconductor memory cell Electricity 1 Expired
US7078309B2 Methods for producing a structured metal layer Electricity 0 Expired
US7129173B2 Process for producing and removing a mask layer Electricity 0 Expired
US6797613B2 Process for depositing WSix layers on a high topography with a defined stoichiometry Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.