Beam evaluation
US6545275B1 · kind B1 · utility
12Cited by
9References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 1999 |
| Grant date | Apr 8, 2003 |
| Priority date | — |
| Expiry date | Sep 3, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2823
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides, according to a first aspect, a method for automatically evaluating the performance of a charged particle device. The method uses a signal coming from a gold-on-carbon reference target. From this signal the spot size of the particle beam is determined. The method according to the present invention has the advantage that it does not depend on operator judgment. Therefore, the method leads to improved consistency, accuracy and reliability of the beam characterization, and, accordingly, to a better characterization of the quality of the system's performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.