Optoelectronic microelectronic system

US6553157B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Thomas W. Schultz · Edina, US
• Wolfgang Rosner · Hersbruck, DE
• Lothar Risch · Neubiberg, DE

Key dates

• Filing date: Mar 7, 2002
• Grant date: Apr 22, 2003
• Expiry date: Mar 7, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/103

Abstract

In an integrated optoelectronic microelectronic system, an optoelectronically active diode part is formed in a semiconductor substrate by zones forming depletion layers. The system is provided in a mesa that stands vertically on a semiconductor substrate and runs in a direction of extension thereof. A light waveguide is optically coupled to the diode part in such a way that light is coupled into the diode part via the mesa side wall.