Plasma probe and method for making same
US6553853B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2002 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Jan 25, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D11/245
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe for measuring properties of plasma includes a shell, a contact extending through the shell and having a first connecting portion positioned in the shell, and a connector guide attached to a second connecting portion, the second connecting portion being detachably coupled to the first connecting portion. In another embodiment, a probe for measuring properties of plasma includes a shell, a contact extending through the shell, wiring extending from the contact and along an interior of the shell, and a coolant inlet line for injecting coolant into the interior of the shell for cooling the wiring. A method for cooling wiring positioned in an interior of a probe includes providing a coolant inlet line for injecting coolant into the interior of the probe and inserting the coolant inlet line in the interior of the probe such that the coolant cools the wiring. A method for assembling a probe having a shell and a contact extending through the shell and having a first connecting portion positioned in the shell includes attaching a connector guide to a second connecting portion adapted for detachably coupling to the first connecting portion and inserting the second connecting portion a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.