Ricky Marsh
13Patents
5h-index
13Co-inventors
63Inventor score
Filing activity: Jun 28, 1996 → Jun 23, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5933314A | Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks | Emerging Cross-Sectional Technologies | 69 | Expired |
| US9059678B2 | TCCT match circuit for plasma etch chambers | Electricity | 24 | Active |
| USD405443S | Aircraft personal video monitor | General | 21 | Expired |
| US10264663B1 | Matchless plasma source for semiconductor wafer fabrication | Electricity | 13 | Active |
| US10638593B2 | Matchless plasma source for semiconductor wafer fabrication | Electricity | 6 | Active |
| US9293353B2 | Faraday shield having plasma density decoupling structure between TCP coil zones | Electricity | 4 | Active |
| US6553853B2 | Plasma probe and method for making same | Physics | 3 | Expired |
| US9978565B2 | Systems for cooling RF heated chamber components | Electricity | 3 | Active |
| US6357308B1 | Plasma probe and method for making same | Physics | 2 | Expired |
| US11716805B2 | Matchless plasma source for semiconductor wafer fabrication | Electricity | 2 | Active |
| US11224116B2 | Matchless plasma source for semiconductor wafer fabrication | Electricity | 1 | Active |
| US10056231B2 | TCCT match circuit for plasma etch chambers | Electricity | 0 | Active |
| US12193138B2 | Matchless plasma source for semiconductor wafer fabrication | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.