Crystal puller for growing monocrystalline silicon ingots
US6554898B2 · kind B2 · utility
7Cited by
26References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2002 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Sep 25, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1072
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A crystal puller for growing monocrystalline silicon ingots includes first and second electrical resistance heaters in the crystal puller in longitudinal, closely spaced relationship with each other to radiate heat toward the ingot as the ingot is pulled upward within the housing. An adapter mounting the heaters may also be provided for adapting existing crystal pullers to incorporate the heaters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.