Plasma vacuum pump
US6559601B1 · kind B1 · utility
5Cited by
2References
29Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 2, 2001 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Jul 2, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/54
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.