Metal wire fuse structure with cavity

US6566238B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Axel Brintzinger · Fishkill, US
• Edward W. Kiewra · Burlington, US
• Chandrasekhar Narayan · Hopewell Junction, US
• Carl Radens · Lagrangeville, US

Key dates

• Filing date: May 21, 2001
• Grant date: May 20, 2003
• Expiry date: May 21, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/3011
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An integrated circuit has primary devices and redundant devices being selective substituted for the primary devices through at least one fuse. The fuse includes a first layer having at least one fuse link region, a second layer over the first layer and cavities in the second layer above the fuse link region.