Method for measuring surface leakage current of sample
US6570390B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 29, 2001 |
| Grant date | May 27, 2003 |
| Priority date | — |
| Expiry date | Aug 29, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/44
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of measuring a surface leakage current includes applying a voltage between a pair of electrodes, which are apart from each other on a sample surface, during a predetermined period of time. A region of the sample surface between the pair of electrodes is irradiated by energy rays during an irradiation period of time which is within the voltage application time. The energy rays may be lasers, ultraviolet rays, X-rays or an electron beam. A current flowing between the pair of electrodes is measured during the voltage application time. The energy rays irradiation causes a surface leakage current, which is caused by adhered substances, to start to flow, and when the adhered substances have been eliminated perfectly, a relatively large current caused by the adhered substances disappears. Perfect elimination of the adhered substances can be verified by confirming that the relatively large current has disappeared.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.