Method of producing contact structure
US6576301B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2000 |
| Grant date | Jun 10, 2003 |
| Priority date | — |
| Expiry date | Oct 14, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06711
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for producing a contact structure having a contactor for achieving an electrical connection with a contact target. The method include the steps of providing a substrate, forming a polymer layer on a surface of the dielectric substrate, positioning a micromachining tool over the first abrasive layer and irradiating a beam of electro-thermal energy on a surface of the polymer layer to form a deposition pattern thereon, depositing conductive material in the deposition pattern on the polymer layer thereby forming a horizontal portion of the contactor, and repeating the above steps, thereby forming a contact portion of the contactor in a vertical direction on one end of the horizontal portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.