Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
US6583875B1 · kind B1 · utility
11Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2000 |
| Grant date | Jun 24, 2003 |
| Priority date | — |
| Expiry date | May 19, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An method and apparatus are disclosed for accurately and repeatably determining the thickness of a thin film on a substrate. A rotating compensator ellipsometer is used which generates both 2&ohgr; and 4&ohgr; output signals. The. 4&ohgr; omega signal is used to provide an indication of the temperature of the sample. This information is used to correct the analysis of the thin film based on the 2&ohgr; signal. These two different signals generated by a single device provide independent measurements of temperature and thickness and can be used to accurately analyze a sample whose temperature is unknown.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.