Lanhua Wei
18Patents
8h-index
15Co-inventors
65Inventor score
Filing activity: Apr 20, 1999 → Dec 8, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6738138B2 | Small spot ellipsometer | Physics | 68 | Expired |
| US6281027A | Spatial averaging technique for ellipsometry and reflectometry | Electricity | 26 | Expired |
| US6515744B2 | Small spot ellipsometer | Physics | 18 | Expired |
| US9470639B1 | Optical metrology with reduced sensitivity to grating anomalies | Physics | 17 | Active |
| US6714300B1 | Optical inspection equipment for semiconductor wafers with precleaning | Electricity | 13 | Expired |
| US6608689B1 | Combination thin-film stress and thickness measurement device | Physics | 11 | Expired |
| US6583875B1 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Physics | 11 | Expired |
| US6870621B2 | Small spot ellipsometer | Physics | 9 | Expired |
| US6930771B2 | Optical inspection equipment for semiconductor wafers with precleaning | Electricity | 7 | Expired |
| US7054006B2 | Self-calibrating beam profile ellipsometer | Physics | 7 | Expired |
| US7068370B2 | Optical inspection equipment for semiconductor wafers with precleaning | Electricity | 6 | Expired |
| US6577384B2 | Spatial averaging technique for ellipsometry and reflectometry | Electricity | 5 | Expired |
| US7342661B2 | Method for noise improvement in ellipsometers | Physics | 2 | Expired |
| US9857291B2 | Metrology system calibration refinement | Physics | 2 | Active |
| US6509199B2 | Spatial averaging technique for ellipsometry and reflectometry | Electricity | 1 | Expired |
| US6856385B2 | Spatial averaging technique for ellipsometry and reflectometry | Electricity | 1 | Expired |
| US10605722B2 | Metrology system calibration refinement | Physics | 1 | Active |
| US6894781B2 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.